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New Products

MFS Gasket Filter (4GFM)

■ 3 Nanometer particle filtering capability keeps up high flow efficiency with minimum pressure drop
■ Gasket surface finish on gas wetted surface is 5µin in Ra with electro polishing
■ Baked with hot nitrogen after DI water cleaning to meet semiconductor process standards
■ Class 100 manufacturing, cleaning and packaging environment 
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Ordering Information Specifications
Removal Rating ≥ 0.0025 ㎛
Retention Greater than 99.9999999% Removal of all particles down to 0.0025 ㎛
Rated flow @ 109 40 SLPM
Max. Operating Temperature 460℃
Surface finish interior ≥ Ra 5μin
Dimensions                                         [DS4GFM-40]                                                             [DS4GFMR-40]
Size Seal Type Part Number A/mm B/mm H/mm
1/4˝ MFS Type DS4GFM-40 (3.25) 12.7 27.6
1/4˝ MFS Type DS4GFMR-40 (3.25) 12.6 27.6
Performance Data