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UHP Canisters Series

Canister is a container that keep the precursor which is mainly used in CVD
and ALD processes, in a safe state without leakage or deterioration when it is being stored, moved, or used.
In addition, the canister is used to supply a precursor in various suitable ways
according to the equipment specification and process condition.
We acquired UN certificate to meet the various need of customers.

Canister (CNT)

■ Upper and lower part united canister that is designed for research purposes and so only uses a small amount of chemicals.
■ It is an exchangeable type of canister, which is generally used in university labs or research centers,and the level sensor is not applied to this canister.
■ With the bubbler method applied, it is used mainly in processes where chemicals with low vapor pressure are vaporized and transported. 
canister.gif
CANISTER ■ Specifications
CLASS Specification
TRANSFER TYPE VFC,Bubbler, DLI Type
Valve type Diaphragm Valve , Bellows Valve Etc
Purge Valve None
Gasket None
Inlet / Out let Port 1/4", 3/8", 1/2" Metal Face Seal
Refill Port 1/2" Male VCR


■ Features ■ Design & Manufacturing according to UHP Semi Standards. ■ Vertical (Horizontal) Electropolished Stainless Steel Bubbler with Fill Port is available. ■ Customized valve can be available by replacing Seat (HPR Series). ■ Connection Size : 1/4", 3/8", 1/2" ■ Connection Type : MFS (Metal Face Seal) Type. ■ Volume ( Liter ) : 0.1, 0.2, 0.4, 0.5, 1.0, 2.5, 4.5, 6.0, 10, 20, 100, 200. ■ Canister can be provided upon customer's request. ■ Flow Control : Valve + MFC (Mass Flow Control).

Bubbler Type VFC Type DLI Type
 
It is applicable when normal vapor pressure and small volume of delivered precursor is forcibly vaporized to the equipment IIt is applicable when high vapor pressure and small volume of delievered precusor is forcibly vaporized to the equipment It is applicable when low vapor pressure and large volume of delivered precusor is forcibly vaporized to the equipment
■ Product Concept