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IGS Component Series

IGS (Integrated Gas System) is applied to
the major components on the base plate and
composed of manual valve, filter, regulator, PT sensor, MFC
and pneumatic valve.
It controls the gas flow precisely in the Gas Box.

IGS Pneumatic Block Valve (11PBDV6 / 15PBDV6)

■ Highly resistant to corrosion using nickel-cobalt alloy diaphragm.
■ Minimal particle generation.
■ Minimal contributions of Moisture, Oxygen and Hydrocarbon.
■ W-seal components 1.125 in & 1.5 in.
■ Footprint and compact (footprint), to reduce the space required.
■ Assembly and lightweight for easy component. 
uhp_igs_pbdv6.gif
Major Specifications
Max. Working Pressure (G.) 1Mpa
Max. Working Temp. -10 ~ 80℃ (PCTFE) -10 ~ 150℃ (PFA)
Actuator Operating Pressure 0.4 ~ 0.6 Mpa
Internal, External Leakage Allowance (He)
Test Pressure ≤ 1×10-2 Torr
Holding Time ≥ 1 min.
1x10-10Pa · ㎥/s
Seat Across Leakage Allowance (He)
Test Pressure ≤ 1×10-2 Torr
Holding Time ≥ 15 sec.
1x10-10Pa · ㎥/s
Particle Inspection Pressure : 60 ~ 80psi N2 Gas
Sample Volume : 1CFM 0.1㎛ and Larger
No count
Inner Surface Roughness Ry ≤ 0.7㎛ 5 μinch Ra(Avg.)
Material
Body Diaphragm Seat Actuator
316L Stainless Steel Remelted Ni - Co Alloy PCTFE, PFA AL
■ Dimensions
Size Seal Type Flow Part Number A B C D L H
1.125" W-Seal 1T23 11PBDV6 - 3W1T23 - C 21.8 80 28.5 18.75 89.5 76.7
3T12 11PBDV6 - 3W3T13 - C 21.8 80 28.5 18.75 89.5 76.7
1.5" 1T23 15PBDV6 - 3W1T23 - C 30 78.5 39 22.5 91.5 100.5
3T12 15PBDV6 - 3W3T12 - C 30 78.5 39 22.5 91.5 100.5