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IGS (Integrated Gas System)

IGS stands for Integrated Gas System is the device that it supplies and controls the high purity gas to the equipment of the semiconductor
manufacturing process and is the integrated device by the block access to the unit.
IGS can be provided two different sealing type as W-Seal and C-Seal
and offers superior performance realizing the miniaturization, high reliability, space saving,
cost reduction and easy maintenance by replacing the conventional model.

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  • Integrated Gas System (IGS)