Products

New Products

IGS Valve Series

IGS Valve is composed of Shutoff Valve, Pneumatic Diaphragm Valve,
Pneumatic Block Valve, Metering Valve, Check Valve and can be provided by
W-Seal and C-Seal on the sealing type
in the semiconductor equipment application.

IGS Manual Valves - Shutoff Type (11NSODVK / 15NSODVK)

■ Shutoff type handle operation.
■ Lockable in the closed position for safety
■ Minimal particle generation.
■ Minimal contributions of moisture, oxygen and hydrocarbon.
■ W & C-seal components 1.125 in & 1.5 in.
■ Footprint and compact (footprint), to reduce the space required.
■ Assembly and lightweight for easy component. 
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Major Specifications
Max. Working Pressure (G.) 1Mpa
Max. Working Temp. -10 ~ 80℃ (PCTFE)
-10 ~ 150℃ (PFA)
Cv 0.2
Internal, External Leakage Allowance(He)
Test Pressure ≤ 1X10-2 Torr
Holding Time ≥ 1 min
1x10-10Pa · ㎥/s
Internal, External Leakage Allowance(He)
Test Pressure ≤ 1X10-2 Torr
Holding Time ≥ 15sec.
1x10-10Pa · ㎥/s
Particle Inspection
Pressure: 60~80psi
N2 Gas Sample Volume: 1CFM
0.1μm and Larger
No count
Inner Surface Roughness Ry ≤ 0.7㎛ 5 μinch Ra(Avg.)
Material
Body Diaphragm Seat Handle
316L Stainless Steel Remelted Ni - Co Alloy PCTFE, PFA AL
Dimensions
Size Seal Type Port Part Number A B C H
1.125" W-Seal 2 11NSODVK-2W 21.8 10 28.6 108
3 11NSODVK - 3W3T12 21.8 10 28.6 108
C-Seal 2 11NSODVK - 2C 21.8 10.9 28.6 106.2
3 11NSODVK - 3C3T12 21.8 10.9 28.6 106.2
1.5" W-Seal 2 15NSODVK - 2WS 30 6.5 26 108
2 15NSODVK - 2W 30 13 39 108
3 15NSODVK - 3W3T12 30 13 39 108
C-Seal 2 15NSODVK - 2C 30.2 15.1 39 106.2
3 15NSODVK - 3C3T12 30.2 15.1 39 106.2