IGS Valve Series
IGS Valve is composed of Shutoff Valve, Pneumatic Diaphragm Valve,
Pneumatic Block Valve, Metering Valve, Check Valve and can be provided by
W-Seal and C-Seal on the sealing type
in the semiconductor equipment application.
IGS Manual Valves - Shutoff Type (11NSODVK / 15NSODVK)
| ■ Shutoff type handle operation. ■ Lockable in the closed position for safety ■ Minimal particle generation. ■ Minimal contributions of moisture, oxygen and hydrocarbon. ■ W & C-seal components 1.125 in & 1.5 in. ■ Footprint and compact (footprint), to reduce the space required. ■ Assembly and lightweight for easy component. |
Major Specifications
| Max. Working Pressure (G.) | 1Mpa |
|---|---|
| Max. Working Temp. | -10 ~ 80℃ (PCTFE)
-10 ~ 150℃ (PFA) |
| Cv | 0.2 |
| Internal, External Leakage Allowance(He) Test Pressure ≤ 1X10-2 Torr Holding Time ≥ 1 min |
1x10-10Pa · ㎥/s |
| Internal, External Leakage Allowance(He) Test Pressure ≤ 1X10-2 Torr Holding Time ≥ 15sec. |
1x10-10Pa · ㎥/s |
| Particle Inspection Pressure: 60~80psi N2 Gas Sample Volume: 1CFM 0.1μm and Larger |
No count |
| Inner Surface Roughness | Ry ≤ 0.7㎛ 5 μinch Ra(Avg.) |
| Body | Diaphragm | Seat | Handle |
|---|---|---|---|
| 316L Stainless Steel Remelted | Ni - Co Alloy | PCTFE, PFA | AL |
| Size | Seal Type | Port | Part Number | A | B | C | H |
|---|---|---|---|---|---|---|---|
| 1.125" | W-Seal | 2 | 11NSODVK-2W | 21.8 | 10 | 28.6 | 108 |
| 3 | 11NSODVK - 3W3T12 | 21.8 | 10 | 28.6 | 108 | ||
| C-Seal | 2 | 11NSODVK - 2C | 21.8 | 10.9 | 28.6 | 106.2 | |
| 3 | 11NSODVK - 3C3T12 | 21.8 | 10.9 | 28.6 | 106.2 | ||
| 1.5" | W-Seal | 2 | 15NSODVK - 2WS | 30 | 6.5 | 26 | 108 |
| 2 | 15NSODVK - 2W | 30 | 13 | 39 | 108 | ||
| 3 | 15NSODVK - 3W3T12 | 30 | 13 | 39 | 108 | ||
| C-Seal | 2 | 15NSODVK - 2C | 30.2 | 15.1 | 39 | 106.2 | |
| 3 | 15NSODVK - 3C3T12 | 30.2 | 15.1 | 39 | 106.2 |