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IGS Valve Series

IGS Valve is composed of Shutoff Valve, Pneumatic Diaphragm Valve,
Pneumatic Block Valve, Metering Valve, Check Valve and can be provided by
W-Seal and C-Seal on the sealing type
in the semiconductor equipment application.

IGS Pneumatic Valves (11PDV6 / 15PDV6)

■ Highly resistant to corrosion using nickel-cobalt alloy diaphragm.
■ Minimal particle generation.
■ Minimal contributions of Moisture, Oxygen and Hydrocarbon.
■ W-seal components 1.125 in & 1.5 in.
■ Footprint and compact (footprint), to reduce the space required.
■ Assembly and lightweight for easy component. 
uhp_igs_pdv6.gif
Major Specifications
Max. Working Pressure (G.) 1Mpa
Max. Working Temp. -10 ~ 80℃ (PCTFE)
-10 ~ 150℃ (PFA)
Actuator Operating Pressure 0.4 ~ 0.6 Mpa
Cv 0.3
Internal, External Leakage Allowance (He)
Test Pressure ≤ 1×10-2 Torr
Holding Time ≥ 1 min.
1x10-10Pa · ㎥/s
Seat Across Leakage Allowance (He)
Test Pressure ≤ 1×10-2 Torr
Holding Time ≥ 15 sec.
1x10-10Pa · ㎥/s

Particle Inspection Pressure : 60~80psi 
N2 Gas Sample volume : 1CFM

0.1㎛ and Larger

No count
Inner Surface Roughness Ry ≤ 0.7㎛ 5 μinch Ra(Avg.)
Material
Body Diaphragm Seat Actuator
316L Stainless Steel Remelted Ni - Co Alloy PCTFE, PFA AL
■ Dimensions
Size Seal Type Port Part Number A B C H
1.125" W-Seal 2 11PDV6 - 2W - C 21.8 10 28.5 79.7
3 11PDV6 - 3W3T12 - C 21.8 10 28.5 79.7
C-Seal 2 11PDV6 - 2C - C 21.8 10.9 28.5 79.7
3 11PDV6 - 3C3T12 - C 21.8 10.9 28.5 79.7
1.5" W-Seal 2 15PDV6 - 2WS - C 30 6.5 26 86.4
2 15PDV6 - 2W - C 30 13 39 98
3 15PDV6 - 3W3T12 - C 30 13 39 102
C-Seal 2 15PDV6 - 2C - C 30.2 15.1 39 98
3 15PDV6 - 3C3T12 - C 30.2 15.1 39 102