Products

New Products

Regulator Series

Pressure Regulator can be provided by different
range of inlet & outlet pressure, and
Gauges can be optional according to customer’s requirements.
Depending on the application,
Regulator is made by Single Stage and Double Stage.

Ultra High Purity Regulator (RG2)

■ Designed for point-of-use high flow to be used in process gas cabinets for gas companies, equipment manufactures and semiconductor manufacturers.
■ The RG2 provides precise control of process gas pressure at or near the tool for flow rates of up to 600 SLPM at 300 PSIG inlet.
■ All internal surfaces are finished with 10Ra or 5Ra to ensure minimal particle generation and entrapment. Metal-to-metal diaphragm seals provide enhanced leak tight integrity.
■ Every step of assembly, welding, testing and final cleaning finished in Class 100 or 10 cleanrooms. 
uhp_RG2.jpg
■ Specifications
Fluid Media
All gases corrosive or non-corrosive or those requiring high purity regulation compatible with materials of construction. For other media, consult with factory.
Pressure Rating Per criteria of ANSI / ASME B31.3.
Max. rated inlet pressure 600, 1000, 3500 psig (41, 69, 241 bar)
Outlet pressure ranges 1-30, 1-60, 1-100 and 1-150 psig (.1-2.1, .1-4.1, .1-6.9, and .1-10.3bar)
Design proof pressure 150% of Maximum rated pressure
Materials in Contact with Media
Body 316L Stainless Steel
Seat 3500 psig - Vespel / 1000 psig - PCTFE, 600 psig - PFA
Diaphragm Hastelloy C-22
Gas contact parts 316L Stainless Steel
Other Parameters
Flow coefficient Cv=0.5
Certified maximum inboard leak rate 1 X 10-9 atm cc/sec He
Internal surface finish 10Ra or 5Ra microinch(.25 or .13 micrometer)
Operating temperature
PCTFE seat -15℉ to + 200℉ (-26℃ to +93℃)
Vespel seat -15℉ to + 300℉ (-26℃ to +149℃)
Weight (w/o gauges) 3.5lbs.(1.6kg)
Flow Curves Ordering Information
[1] Material
S = 316L Stainless Steel
D = 316L Stainless Steel Remelted
[2] Connection Size
6 = 3/8"
8 = 1/2"
[3] Product
RG2 Series
[4] Connection Type
NF = Female NPT Thread
SW = Compression Lok Fitting
TW = Tube Butt Weld
VF = Female Type Face Seal
VM = Male Type Face Seal
VMF = Fixed Male Type Face Seal
[5] Maximum Inlet Pressure
1 = 3500 psig
2 = 1000 psig
3 = 600 psig
[6] Maximum Range of Inlet Gauge
1 = 600 psig
2 = 1000 psig
3 = 3500 psig
4 = 4000 psig
Blank = No Gauge
[7] Gauge Port Configuration
A = No Gauge Port Fig
B = 1/4" Internal Face Seal (Fig. C)
C = 1/4" Internal Face Seal (Fig. B)
D = 1/4" Internal Face Seal (Fig. D)
E = 1/4" Male Face Seal (Fig. D)
[7] Gauge Port Configuration
F = 1/4" Male Face Seal (Fig. C)
G = 1/4" Male Face Seal (Fig. B)
H = 1/4" Female Face Seal (Fig. D)
I = 1/4" Female Face Seal (Fig. C)
J = 1/4" Female Face Seal (Fig. B)
K = 1/4" Fixed Male Face Seal (Fig. B)
L = 1/4" Fixed Male Face Seal (Fig. C)
M = 1/4" Fixed Male Face Seal (Fig. D)
N = 1/4" Female NPT Thread (Fig.B)
O = 1/4" Female NPT Thread (Fig.C)
P = 1/4" Female NPT Thread (Fig.D)
[8] Outlet Pressure Range
0 = 1~ 30 psig
1 = 1~ 60 psig
2 = 1~100 psig
3 = 1~250 psig
[9] Maximum Range of Outlet Gauge
0 = 30 psig
1 = 60 psig
2 = 100 psig
3 = 160 psig
4 = 200 psig
Blank = No Gauge
[10] User Option
Customization
[11] Grade
Blank = BA Standard (10 Ra μin)
P = Electropolishing (5 Ra μin)
PX = Electropolishing (5 Ra μin)