Products

New Products

Regulator Series

Pressure Regulator can be provided by different
range of inlet & outlet pressure, and
Gauges can be optional according to customer’s requirements.
Depending on the application,
Regulator is made by Single Stage and Double Stage.

Ultra High Purity Regulator (RG1)

■ Designed for point-of-use medium flow to be used in process gas cabinets for gas companies, equipment manufactures and semiconductor manufacturers.
■ Precise control of gas pressure at or near the process tool for flow rates of up to 250 SLPM at 300 PSIG inlet.
■ All internal surfaces are finished with 10Ra or 5Ra to ensure minimal particle generation and entrapment.
■ Metal-to-metal diaphragm seals provide enhanced leak tight integrity.
■ Every step of assembly, welding, testing and final cleaning finished in Class 100 or 10 cleanrooms. 
uhp_RG1.jpg
■ Specifications
Fluid Media
All gases corrosive or non-corrosive or those requiring high purity regulation compatible with materials of construction. For other media, consult with factory.
Pressure Rating Per criteria of ANSI / ASME B31.3.
Max. rated inlet pressure 3500 or 600 psig (241 or 41 bar)
Outlet pressure ranges 1-30, 1-60, 1-100, 1-150 or 1-250 psig (.1-2.1, .1-4.1, .1-6.9, .1-10.3 or .1-17.3bar)
Design proof pressure 150% of Maximum rated pressure
Materials in Contact with Media
Body 316L Stainless Steel with BA, Electropolish
Seat PCTFE (Vespel optional for 3500 psig model only)
Diaphragm Hastelloy C-22
Gas contact parts 316L Stainless Steel / Hastelloy C-22 / Inconel 750
Other Parameters
Flow coefficient Cv=0.06(3500 psig model), Cv=0.2(600 psig model)
Certified maximum inboard leak rate 1 X 10-9 atm cc/sec He
Internal surface finish 10Ra or 5Ra microinch(.25 or .13 micrometer)
Operating temperature
PCTFE seat -15℉ to + 176℉ (-26℃ to +80℃)
Vespel seat -15℉ to + 350℉ (-26℃ to +177℃)
Weight (w/o gauges) 2.0lbs.(.9kg)
Flow Curves Ordering Information
[1] Material
S = 316L Stainless Steel
D = 316L Stainless Steel Remelted
DH = 316L Stainless Steel Remelted 
 with Hastelloy internals
[2] Connection Size
4 = 1/4"
[3] Product
RG1 Series
[4] Connection Type
NF = Female NPT Thread
SW = Compression Lok Fitting
TW = Tube Butt Weld
VF = Female Type Face Seal
VM = Male Type Face Seal
VMF = Fixed Male Type Face Seal
[5] Maximum Inlet Pressure
1 = 3500 psig
2 = 600 psig
[6] Maximum Range of Inlet Gauge
1 = 600 psig 2 = 1000 psig
3 = 3500 psig 4 = 4000 psig
Blank = No Gauge
[7] Gauge Port Configuration
A = No Gauge Port (Fig. A)
B = 1/4" Internal Face Seal (Fig. C)
C = 1/4" Internal Face Seal (Fig. B)
D = 1/4" Internal Face Seal (Fig. D)
E = 1/4" Male Face Seal (Fig. D)
F = 1/4" Male Face Seal (Fig. C)
G = 1/4" Male Face Seal (Fig. B)
H = 1/4" Female Face Seal (Fig. D)
[7] Gauge Port Configuration
I = 1/4" Female Face Seal (Fig. C)
J = 1/4" Female Face Seal (Fig. B)
K = 1/4" Fixed Male Face Seal (Fig. B)
L = 1/4" Fixed Male Face Seal (Fig. C)
M = 1/4" Fixed Male Face Seal (Fig. D)
N = 1/4" Female NPT Thread (Fig.B)
O = 1/4" Female NPT Thread (Fig.C)
P = 1/4" Female NPT Thread (Fig.D)
[8] Outlet Pressure Range
0 = 1~ 30 psig
1 = 1~ 60 psig
2 = 1~100 psig
3 = 1~250 psig
4 = 1~150 psig
[9] Maximum Range of Outlet Gauge
0 = 30 psig
1 = 60 psig
2 = 100 psig
3 = 160 psig
4 = 200 psig
5 = 300 psig
Blank = No Gauge
[10] User Option
Customization
[11] Grade
Blank = BA Standard (10 Ra in)
P = Electropolishing (5 Ra in)
PX = Electropolishing (5 Ra in)