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Vacuum Generator Series

Vacuum Generator is creating vacuum by use of compressed air, and is applied to the semiconductor manufacturing process which can be existed TOXIC gas and its residues of different gases in the process. The residue gases can be harmful
to the workers so it is needed to be evacuated by purging function compulsory.
Vacuum Generator can be generated 50 torr vacuum with a minimum source
Nitrogen pressure of 80 psig.

List of Articles
  • Ultra-High Purity Vacuum Generators (VG1)